Nitrogen Trifluoride (NF3) Khase e Hloekileng e Phahameng
Litaba tsa Motheo
| CAS | 7783-54-2 |
| EC | 232-007-1 |
| UN | 2451 |
Boitsebiso boo ke eng?
Nitrogen trifluoride (NF3) ke khase e se nang 'mala ebile e sa nkhang ha mocheso oa kamore le khatello ea sepakapaka. E ka tšelisoa tlas'a khatello e itekanetseng. NF3 e tsitsitse tlas'a maemo a tloaelehileng 'me ha e bole kapele. Leha ho le joalo, e ka bola ha e le tlas'a mocheso o phahameng kapa ho e-na le lintho tse ling tse etsang hore ho be le lintho tse bakang kotsi. NF3 e na le bokhoni bo phahameng ba ho futhumala ha lefatše (GWP) ha e lokolloa sepakapakeng.
U ka sebelisa boitsebiso boo hokae?
Moemeli oa ho hloekisa indastering ea lisebelisoa tsa elektronike: NF3 e sebelisoa haholo e le sesebelisoa sa ho hloekisa bakeng sa ho tlosa litšila tse setseng, tse kang li-oxides, ho tloha holim'a li-semiconductors, li-panels tsa plasma (PDPs), le likarolo tse ling tsa elektronike. E ka hloekisa libaka tsena ka katleho ntle le ho li senya.
Khase e kenang ka har'a tlhahiso ea semiconductor: NF3 e sebelisoa e le khase ea etching ts'ebetsong ea tlhahiso ea li-semiconductors. E sebetsa ka ho khetheha ho etching silicon dioxide (SiO2) le silicon nitride (Si3N4), e leng lisebelisoa tse tloaelehileng tse sebelisoang ha ho etsoa lipotoloho tse kopantsoeng.
Tlhahiso ea metsoako ea fluorine e hloekileng haholo: NF3 ke mohloli oa bohlokoa oa fluorine bakeng sa tlhahiso ea metsoako e sa tšoaneng e nang le fluorine. E sebelisoa e le selelekela sa tlhahiso ea li-fluoropolymers, fluorocarbons, le lik'hemik'hale tse ikhethang.
Ho hlahisa plasma ka mokhoa oa ho hlahisa liphanele tse bataletseng: NF3 e sebelisoa hammoho le likhase tse ling ho theha plasma ha ho etsoa lipontšo tsa liphanele tse bataletseng, tse kang li-crystal displays (LCDs) le PDPs. Plasma e bohlokoa lits'ebetsong tsa ho beha le ho etching nakong ea ho etsoa ha phanele.
Hlokomela hore lits'ebetso le melaoana e ikhethileng ea ts'ebeliso ea thepa/sehlahisoa sena e ka fapana ho ea ka linaha, indasteri le sepheo. Kamehla latela litataiso tsa polokeho 'me u buisane le setsebi pele u sebelisa thepa/sehlahisoa sena ts'ebetsong efe kapa efe.
